Design and Development of Humidity Sensor Based on Alumina and Zirconium Dioxide

Abstract

Humidity calculation is one of the most significant issues in different applications such as automated system, irrigation, instrumentation, climatology and GPS. The design and fabrication of Humidity sensor are mostly used for industries and laboratory applications. This work highlights the fabrication of humidity sensor based on alumina (Al2O3) used as substrate and Zirconium Dioxide (ZrO2) as active or sensing material to detect both moisture and air temperature in the environment. The objective was to fabricate a humidity sensor of compact size with better sensitivity and spatial resolution at low cost. In this project, AUTOCAD software was used for designing and was developed a miniaturized thin film sensor over a ceramic substrate and deposition of active sensing material was done through RF sputtering process. The fabricated humidity sensor has been characterized under different humidity conditions and the results showed a faster response.