Nonlocal electron electrodynamics in high-frequency capacitive discharges

Abstract

Several nonlocal electron behaviors in low-pressure high-frequency capacitive discharges were found through particle-in-cell/Monte Carlo simulations. First, a negative power deposition region becomes wider as the rf frequency decreases. Second, in the spatial profile of the amplitude of the rf electric field, a nonmonotonic structure appears at the bulk-sheath boundary along with an abrupt change in the phase of the rf electric field. Third, in the spatial profile of the amplitude of the rf electron current, the second peak appears in the bulk. © 2006 American Institute of Physics.