Design, fabrication, and testing of a novel 3d 3‐fingered electrothermal microgripper with multiple degrees of freedom

Abstract

This paper presents the design, fabrication, and testing of a novel three‐dimensional (3D) three‐fingered electrothermal microgripper with multiple degrees of freedom (multi DOFs). Each finger of the microgripper is composed of a V‐shaped electrothermal actuator providing one DOF, and a 3D U‐shaped electrothermal actuator offering two DOFs in the plane perpendicular to the movement of the V‐shaped actuator. As a result, each finger possesses 3D mobilities with three DOFs. Each beam of the actuators is heated externally with the polyimide film. The durability of the polyimide film is tested under different voltages. The static and dynamic properties of the finger are also tested. Experiments show that not only can the microgripper pick and place microobjects, such as micro balls and even highly deformable zebrafish embryos, but can also rotate them in 3D space.