Abstract
SnO2 thin films for gas sensing applications were deposited by RF sputtering in a mixture of oxygen and argon. The morphology, structure and composition of the SnO2 films were analysed by XRD, SEM and XPS. SnO2 thin films showed a crystalline structure with a submicron particle size of 200 nm. The electronic structure of the film surface was elucidated by analysis of the photoelectron core level and valence band spectra of Sn.
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CITATION STYLE
Stefanov, P., Atanasova, G., Manolov, E., Raicheva, Z., & Lazarova, V. (2008). Preparation and characterization of SnO2 films for sensing applications. In Journal of Physics: Conference Series (Vol. 100). Institute of Physics Publishing. https://doi.org/10.1088/1742-6596/100/8/082046
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