An efficient analytical approach to visualize text-based event logs for semiconductor equipment

Abstract

Semiconductor equipment consists of a complex system in which numerous components are organically connected and controlled by many controllers. EventLog records all the information available during system processes. Because the EventLog records system runtime information so developers and engineers can understand system behavior and identify possible problems, it is essential for engineers to troubleshoot and maintain it. However, because the EventLog is text-based, complex to view, and stores a large quantity of information, the file size is very large. For long processes, the log file comprises several files, and engineers must look through many files, which makes it difficult to find the cause of the problem and therefore, a long time is required for the analysis. In addition, if the file size of the EventLog becomes large, the EventLog cannot be saved for a prolonged period because it uses a large amount of hard disk space on the CTC computer. In this paper, we propose a method to reduce the size of existing text-based log files. Our proposed method saves and visualizes text-based EventLogs in DB, making it easier to approach problems than the existing text-based analysis. We will confirm the possibility and propose a method that makes it easier for engineers to analyze log files.