Conference Proceedings

Process window aware layout optimization using hot spot fixing system

  • Kobayashi S
  • Kyoh S
  • Kotani T
  • et al.
Design for Manufacturability through Design-Process Integration (2007) 6521 65210B
DOI: 10.1117/12.710299
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Kobayashi, S., Kyoh, S., Kotani, T., & Inoue, S. (2007). Process window aware layout optimization using hot spot fixing system. In Design for Manufacturability through Design-Process Integration (Vol. 6521, p. 65210B). SPIE. https://doi.org/10.1117/12.710299

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