A monolithic pixel sensor with fine space-time resolution based on silicon-on-insulator technology for the ILC vertex detector

Abstract

We are developing a new monolithic pixel sensor with Silicon-on-Insulator (SOI) technology for the ILC vertex detector system. The new SOI sensor SOFIST can store both the position and timing information of charged particles. The first prototype sensor with the pixel pitch of 20 µm was evaluated at 120 GeV proton beam. The position resolution was about 1.7 µm. We are currently designing next prototype sensor chips with the pixel circuit optimized for 3D stacking technology.