Functional probes such as a metal-tip cantilever and a glass-coated tungsten tip for scanning probe microscopy (SPM) were fabricated utilizing focused ion beam method. Using the functional probes, we obtained results which were hard to reach by usual SPM probes. © 2007 IOP Publishing Ltd.
CITATION STYLE
Akiyama, K., Eguchi, T., An, T., Fujikawa, Y., Sakurai, T., & Hasegawa, Y. (2007). Functional probes for scanning probe microscopy. Journal of Physics: Conference Series, 61(1), 22–25. https://doi.org/10.1088/1742-6596/61/1/005
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