Synthesis and Characterization of ZrO 2 Thin Films

Abstract

Zirconia thin films with thicknesses of 40-120 n m on g lass, single-crystal silicon, quart z, polycor, and sap-phire substrates have been prepared from zirconiu m o xochloride and ethanol FFSs. The physicochemical p rocesses in-volved in film format ion and the phase composition and properties of the films have been studied. The films prepared on glass or quartz are amorphous; those on silicon, polycor, or sapphire have a crystal structure. The resulting ZrO 2 films have refract ive index indicator 1,86 – 2,08, are insulators, with h igh indicators of bandgap width 5,0 – 5,2 eV, absorption edge is limited by 220 nM, which allows to use it as reallot light covering.