Production, Measurement and Applications of Vacuum Systems

Abstract

The most common type of vacuum pumps and measuring gauges based on available literature are studied with emphasis on how new research and development will enable the new generation of vacuum technology specially in designing, its operational procedure and applications. The technologies were developed to meet the operational goal which include vacuum chamber structures, compatible materials, specialized vacuum pump and gauges. There are many areas where different vacuum condition is required for conducting experiments therefore modeling of pumping system is on demand. The basic understanding of how and when the particular pumping and measurement system can be applied most effectively and economically is essential. The poor choice of pumping and measurement system will interfere the scientific objectives and may leads to substantial maintenance demands and an unpleasant working environment. The development and fundamental investigation of innovative vacuum techniques for creation and measurement of vacuum used for various applications necessary for the research work to be done in future are presented.