Fabrication of low loss Ge33 As12 Se55 (AMTIR-1) planar waveguides

Abstract

The authors describe the fabrication of low loss Ge33 As12 Se55 rib waveguides. Pulsed laser deposition was used to obtain high quality, dense films with the same stoichiometry as the bulk glass, while standard semiconductor processing was used to pattern the waveguides. They obtained rib waveguides of 3, 4, and 5 μm wide with propagation losses (0.3 dBcm at 1550 nm) more than ten times lower than previously reported for this material. © 2007 American Institute of Physics.