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Advanced Nanofabrication using Helium, Neon and Gallium Ion Beams in the Carl Zeiss Orion NanoFab Microscope

  • Elswick D
  • Ananth M
  • Stern L
  • et al.
Microscopy and Microanalysis (2013) 19(S2) 1304-1305
DOI: 10.1017/s1431927613008519
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

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APA

Elswick, D., Ananth, M., Stern, L., Marshman, J., Ferranti, D., & Huynh, C. (2013). Advanced Nanofabrication using Helium, Neon and Gallium Ion Beams in the Carl Zeiss Orion NanoFab Microscope. Microscopy and Microanalysis, 19(S2), 1304–1305. https://doi.org/10.1017/s1431927613008519

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