Pulse width tuning in electrochemical micro-machining system

Abstract

In electrochemical micro-machining technology using ultra-short pulses, the machining accuracy is limited by pulse width of the power supply. Here, a mathematical model for tuning pulse width in electrochemical micro machining by means of differential circuits was proposed. Using this model, the step responses of the system under different time constants were simulated, which showed that the pulse width of the step response becomes quite short when the time constant of the differential circuit is short enough. Based on the model, an electrochemical micro-machining system was produced. Using this system, some micro-structures were successfully produced. The machining accuracy reaches the nanometer scale. This illustrates our model for tuning pulse width in electrochemical micro machining.