Spectroscopic measurements of ablation plasma generated with laser-driven intense extreme ultraviolet (EUV) light

Abstract

Material ablation by a focused Extreme ultraviolet (EUV) light is studied by comparing expanding ion properties and plasma parameters with laser ablation. The kinetic energy distributions of expanding ions from EUV and laser ablation showed different spectra implying different geometries of plasma expansion. The calculation results of plasma parameters showed that EUV energy is mostly deposited in high electron density region close to the solid density, while laser energy is deposited in low energy density region. Plasma parameters experimentally obtained from visible spectra did not show noticeable difference between EUV and laser ablation due to the corresponding low cut off density.