Electron velocity distribution functions in a sputtering magnetron discharge for the E×B direction

Abstract

The electron velocity distribution function is measured for the E×B (azimuthal) direction in a cylindrically symmetric, planar, sputtering magnetron discharge as a function of height above the cathode. Near the cathode, the distribution function is approximately a warm Maxwellian (Te≈2 eV) shifted in the E×B direction, indicating a strong azimuthal drift. Farther above the cathode, the distribution function is characterized by a cold (Te≈0.5 eV), Maxwellian bulk with energetic, asymmetric tails.