Calibrating torsional eigenmodes of micro-cantilevers for dynamic measurement of frictional forces

Abstract

Non-invasive thermal noise calibration of both torsional and flexural eigenmodes is performed on numerous cantilevers of 10 different types. We show that for all tipless and short-tipped cantilevers, the ratio of torsional to flexural mode stiffness is given by the ratio of their resonant frequency times a constant, unique to that cantilever type. By determining this constant, we enable a calibration of the torsional eigenmode, starting from a calibration of the flexural eigenmode. Our results are well motivated from beam theory, and we verify them with finite element simulation.