Sequential position readout from arrays of micromechanical cantilever sensors

Abstract

Sequential position readout from a microfabricated array of eight cantilever-type sensors (silicon technology) is demonstrated. In comparison with single sensors we find that mechanical disturbances from noise, such as from vibrations, turbulent gas flow, or abrupt pressure changes, can be effectively removed in array sensors by recording difference signals with respect to reference cantilevers. We demonstrate that chemically specific responses can be extracted in a noisy environment using a sensor to detect specific chemical interactions and an uncoated cantilever as reference. © 1998 American Institute of Physics.