A novel manufacturing technology for RF MEMS devices on ceramic substrates

Abstract

Microelectromechanical systems are often used for their enormous capability and good qualities in T/R modules especially for space modular applications. High isolation and very low insertion loss are guaranteed by their intrinsic working principle. This is a very robust, flexible, and low-cost technology, and it provides high reliability, good reproducibility, and complete fulfillment of technical requirements. Copyright © 2010 V. Schirosi et al.