PROCESS TECHNOLOGY OF FABRICATION NO2 GAS SENSOR DEVICES WITH ACTIVE LAYER In2O3

Abstract

This paper discuss the design and fabrication of NO 2 gas sensor based on metal oxide using thick film technology was described. The design of gas sensor is consisted of components, i.e. heater, electrode (interdigital fingers) and sensitive layer from In 2 O 3 material. This sensor has been designed as multilayers with heater and both electrodes in one surface, in accordance with miniaturisation aspect, heat distribution and less consumption of energy from the sensor device. The heater and electrode were fabricated on alumina substrate (aluminum oxide/Al 2 O 3) with silver paste. The In 2 O 3 layer provides\ resistance change when it is exposed by NO 2 gas. It indicates that this sensor device has a potency to be used as NO 2 detector.