Modeling of leakage currents in high- κ dielectrics: Three-dimensional approach via kinetic Monte Carlo

Abstract

We report on a simulation algorithm, based on kinetic Monte Carlo techniques, that allows us to investigate transport through high-permittivity dielectrics. In the example of TiN/ ZrO2 /TiN capacitor structures, using best-estimate physical parameters, we have identified the dominant transport mechanisms. Comparison with experimental data reveals the transport to be dominated by Poole-Frenkel emission from donorlike trap states at low fields and trap-assisted tunneling at high fields. © 2010 American Institute of Physics.