3C-SiC phononic waveguide for manipulating mechanical wave propagation

Abstract

We present experimental demonstration and modeling of mechanical wave propagation in a quasi-one-dimensional (quasi-1D) phononic crystal (PnC) waveguide (WG) constructed from a periodic array of single-crystal cubic-silicon carbide (3C-SiC) coupled micromechanical resonators, with an exceptional dynamic range exceeding 92 dB. The PnC design comprises 50 periodic cells, enabling the propagation of flexural mechanical waves in high-frequency and very-high-frequency bands, featuring a broad PnC bandgap spanning approximately 24-27.5 MHz. Furthermore, the 3C-SiC PnC WG exhibits excellent characteristics, including a high group velocity of 350 m/s and a low transmission loss of 0.69 dB/mm, enabling efficient guidance and support for mechanical waves across extended distances before reaching the noise level of the device. These attributes of the PnC WG, as demonstrated in this study, may open possibilities for the development of device platforms with applications in on-chip signal processing, sensing, and quantum transducer technologies.