Impedance Analysis of Chitin Nanofibers Integrated Bulk Acoustic Wave Humidity Sensor with Asymmetric Electrode Configuration

Abstract

This paper fabricated a high-performance chitin nanofibers (ChNFs)-integrated bulk acoustic wave (BAW) humidity sensor with an asymmetric electrode configuration. The ChNFs were successfully prepared from crab shells and used as moisture-sensitive materials to compare the performance of quartz crystal microbalance (QCM) humidity sensors with symmetric and asymmetric electrode structures. The QCM humidity sensor with a smaller electrode area exhibited high sensitivity of 58.84 Hz/%RH, competitive response/recovery time of 30/3.5 s, and low humidity hysteresis of 2.5% RH. However, it is necessary to choose a suitable electrode diameter to balance the stability and sensitivity because the impedance analysis result showed that the reduction of the electrode diameter leads to a sharp decrease in the Q value (stability). Next, the possible humidity-sensitive mechanism of the ChNFs-integrated asymmetric n-m electrode QCM humidity sensor was discussed in detail. Finally, the reasons for the highest sensitivity of the asymmetric n-m electrode QCM humidity sensors having a smaller electrode diameter were analyzed in detail in terms of both mass sensitivity and fringing field effect. This work not only demonstrates that the chitin nanofiber is an excellent potential material for moisture detection, but also provides a new perspective for designing high-performance QCM humidity sensors.