MEMS-based linear micromirror array with a high filling factor for spatial light modulation

Abstract

A smart digital micromirror device (DMD) was employed to realize the on-chip scanning in versatile hyperspectral imaging (HSI) systems in our previous research. However, the rotation manner around the diagonal of the DMD makes the imaging subsystem and the spectral dispersion subsystem unable to be in the same horizontal surface. This leads to the difficulty in designing the opto-mechanical structures, system assembly and adjustment of the light path to a certain extent. On the other hand, the HSI system also needs a larger space to accommodate the two subsystems simultaneously since either of them has to incline against the horizontal surface. Moreover, there exists the interference of the reflected light between the adjacent micromirrors during the scanning process performed by the DMD, causing the loss of optical information about the object. Here, a novel linear micromirror array (MMA) based on the microelectromechanical system process that rotates around one lateral axis of the micromirror is developed, which is helpful to simplify the optical system of HSI and obtain more optical information about the detected target. The MMA has 32 independent linear micromirrors across an aperture of 5mm×6.5mm, under which there are dimple structures and a common bottom electrode. Finally, the MMA with a 98.6% filling factor is successfully fabricated by employing the bulk micromachining process. The experimental results show that the maximum rotational angle is 5.1° at a direct current driving voltage of 30 V. The proposed micromirror array is promising to replace the DMD and shows potential as a spatial light modulator in the fields of hyperspectral imaging, optical communication, and so on.