Synthesis and characterization of Titanium Silicon Nitride (TiSiN) thin film: A review

Abstract

In-depth studies on transition metal are required to understand about different properties of materials. Different deposition techniques like rf magnetron sputtering, hot pressing, ion beam assisted deposition, ion arc plating and chemical vapour deposition were employed to deposit TiSiN. The morphology, mechanical and structural properties of TiSiN thin film coating has been characterized by different processes (e.g. AFM, SEM, TEM, XRD, Nanoindentation etc.). Many researchers also studied mechanical properties to investigate different parameters like hardness, fracture toughness, Young's modulus etc. This review paper is aimed to summarize all the properties studied by the different researchers on titanium silicon nitride.