In this paper optical characteristics of porous silicon layers and nanoparticles are investigated. Samples were obtained by electrochemical anodic etching of n-type conductivity monocrystalline silicon wafers. It is shown that the surface morphology porous silicon samples are depending on etching technological parameters.
CITATION STYLE
Belorus, A. O., Pastukhov, A. I., Lenshin, A. S., Seredin, P. V., Spivak, Y. M., & Moshnikov, V. A. (2018). Investigation optical properties and functional surface characteristics of nanoparticles based on porous silicon for applications in biomedicine. In Journal of Physics: Conference Series (Vol. 1124). IOP Publishing Ltd. https://doi.org/10.1088/1742-6596/1124/3/031011
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