Soft ferrite cores characterization for integrated micro-inductors

Abstract

Ferrite-based micro-inductors are proposed for hybrid integration on silicon for low-power medium frequency DC-DC converters. Due to their small coercive field and their high resistivity, soft ferrites are good candidates for a magnetic core working at moderate frequencies in the range of 5-10 MHz. We have studied several soft ferrites including commercial ferrite film and U70 and U200 homemade ferrites. The inductors are fabricated at wafer level using micromachining and assembling techniques. The proposed process is based on a sintered ferrite core placed in between thick electroplated copper windings. The low profile ferrite cores of 1.2 × 2.6 × 0.2 mm3 are produced by two methods from green tape-casted films and ferrite powder. This paper presents the magnetic characterization of the sintered ferrite films cut and printed in rectangular shape and sintered at different temperatures. The comparison is made in order to find out the best material for the core that can reach the required inductance (470 nH at 6 MHz) under 0.6A current DC bias and that generate the smallest losses. An inductance density of 285 nH/ mm 2 up to 6 MHz was obtained for ESL 40011 cores that is much higher than the previously reported devices. The small size of our devices is also a prominent point. © Published under licence by IOP Publishing Ltd.