Mechanical and dielectric properties of pure-silica-zeolite low-k materials

Abstract

(Figure Presented) Special k: Pure silica zeolites (PSZs) have been shown experimentally to display a remarkably higher elastic modulus than amorphous porous silicas at any given porosity or dielectric constant (k) value as a result of their crystalline structure. The combined experimental and theoretical findings suggest that PSZs have the necessary properties for use as the next generation of low-k insulators. © 2006 Wiley-VCH Verlag GmbH & Co. KGaA.