Thermoelectric Peltier micromodules processed by thin-film technology

Abstract

In this paper we consider the structure and manufacturing technology of thermoelec-tric Peltier micromodule consisting of 288 thermocouples enclosed between two silicon wafers. Method for obtaining thermoelements i.e the method of electrochemical deposition from an electrolyte solution, has been proposed. Elemental and structural analysis of the obtained semi-conductor thermoelements of bismuth telluride and antimony telluride has been carried out. The obtained composition is 39.5% Bi-60.5% Te for Bi 2 Te 3 and 39% Sb-61% Te for Sb 2 Te 3 .