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Investigation of high-quality-factor aluminum nitride MEMS cantilever resonators

Nanotechnology and Precision Engineering (2024) 7(1)
DOI: 10.1063/10.0022173
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Abstract

ARTICLE HIGHLIGHTS HIGHLIGHTS • A novel structure for cantilever resonators with AlN structural layers is proposed, which helps to achieve higher performance. • The effect of geometric design and electrode patterns on the Q value and the optimization methods were studied. • The Q value reached up to 8000 after optimization, which is the highest among similar resonators in previous work.

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Shi, S., Yang, Q., Yuan, Y., Li, H., Niu, P., Guo, W., … Pang, W. (2024). Investigation of high-quality-factor aluminum nitride MEMS cantilever resonators. Nanotechnology and Precision Engineering, 7(1). https://doi.org/10.1063/10.0022173

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