The modern cryopump

Abstract

Cryopumps cooled by cryogenerators are increasingly being accepted as an important contribution to the range of pumping techniques available to the vacuum engineer. This paper sets out to explain in detail how such cryopumps operate, in order that their strengths and limitations can properly be understood and potential users can make the correct choice of pump for each particular application. © 1979 Pergamon Press Ltd.