Introduction of nano-seconds pulsed discharge plasma and its applications

Abstract

During the decades, the developments of high power semiconductor switch, magnetic core and etc have allowed us to manufacture the pulsed power source having higher energy transfer efficiency. As the results, the pulsed discharge has been recognized as one of the promised non-thermal plasma to practical use. In this paper, a generation process, electron energy, impedance and a temperature of the pulsed discharge plasma would be explained. In addition, a nano-seconds pulsed discharge plasma would be introduced as the non-thermal plasma processing giving us the highest energy efficiency and be demonstrated it. © 2009 The Institute of Electrical Engineers of Japan.