Stark broadening experiments on a vacuum arc discharge in tin vapor

Abstract

Pinched discharge plasmas in tin vapor are candidates for application in future semiconductor lithography tools. This paper presents time-resolved measurements of Stark broadened linewidths in a pulsed tin discharge. Stark broadening parameters have been determined for four lines of the [formula presented] spectrum in the range from 522 to [Formula presented], based on a cross-calibration to a [formula presented] line with a previously known Stark width. The influence of the electron temperature on the Stark widths is discussed. Results for the electron densities in the discharge are presented and compared to Thomson scattering results. © 2004 The American Physical Society.