Batch fabrication technique of NdFeB for MEMS based electromagnetic energy harvester

Abstract

This study presents a wafer-level batch fabrication technique of NdFeB film for MEMS (Micro Electromechanical Systems) based electromagnetic type energy harvester. By using 20 μm thickness NdFeB sputtered magnetic film on a trench-etched Si microstructure, fine patterned magnet structures for energy harvester had been realized. However the size of the sputtered sample was limited to the slightly small size. In this study, we improve the sputtering equipment to apply the NdFeB film process on a four-inch Si wafer. The film characteristics, estimation of the compatibility with the MEMS process and also energy harvesting result are presented. © 2012 The Authors. Published by Elsevier Ltd.