Thin-film, aluminum nitride (AlN) can be utilized in piezoelectric actuators as an alternative to PZT, enabling high pressure operation without compressive-stress depolarization. To overcome relatively lower piezoelectric coefficients, amplification flexures (e.g. bi-chevron) are used. This paper describes the design, fabrication and testing of a bi-chevron AlN actuator for a high-pressure microvalve. The AlN microvalve can operate at higher pressures (10 MPa) with a fifty-fold increase in stroke/volume ratio compared to current PZT valves. The actuation stroke is compared with theoretical values and finite element method (FEM) results. The error between FEM and empirical data is less than 17 %. © 2009.
Chen, Y. M., Sheppy, M., Yen, T. T., Vigevani, G., Lin, G. M., Kuypers, J., … Pisano, A. P. (2009). Bi-chevron aluminum nitride actuators for high pressure microvalves. In Procedia Chemistry (Vol. 1, pp. 706–709). https://doi.org/10.1016/j.proche.2009.07.176