Optimization of electrodes design for PZT thin-film actuated membranes

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Abstract

This paper reports on the optimization of electrodes design for sol-gel Pb(Zr0.52, Ti0.48)O3 (PZT) thin-film actuatedmembranes. PZT can be used in many actuator applications such as micro mirror, RF MEMS, inkjet or loudspeaker due to its strong piezoelectric properties. We aim to design membrane-based actuators with the optimum electrode dimensions allowing the largest membrane displacement under a given actuation voltage. We present in this paper measurement results, in good agreement with the finite element modeling, proving that an actuator area between 50 and 60% of the membrane area exhibits the highest deflection. © 2012 The Authors. Published by Elsevier Ltd.

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Casset, F., Michaud, H., Ricart, T., Le Rhun, G., Cueff, M., Abergel, J., … Defaÿ, E. (2012). Optimization of electrodes design for PZT thin-film actuated membranes. In Procedia Engineering (Vol. 47, pp. 108–111). Elsevier Ltd. https://doi.org/10.1016/j.proeng.2012.09.096

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