Water pumping performance of a Cryo-TMP combination pump

Abstract

There is an increasing need to systematically investigate the performance of commercial Cryo-TMP [in-line Cryogenic Water Pump (CWP) + Turbo Molecular Pump (TMP)] combination pumps. In this study, the factors affecting the pumping speed of water in a Cryo-TMP, such as the number of cold rings, dimensions, shape, etc., are systematically analyzed by Monte Carlo simulation. We constructed a test dome and a Cryo-TMP500 based on the simulation results to measure the strict effective pumping performance of the Cryo-TMP. In addition, we established a systematic measurement method for pumping performance using the Cryo-TMP500 in three experimental modes: TMP-only mode, CWP-off mode, and CWP-on mode. The results show that the water pumping speed of the Cryo-TMP500 with only one cold ring is ∼76% of that of a standalone cryopump (∼30 000 L/s) with the same opening inlet diameter; this speed is 22 550 L/s, which is in good agreement with the simulation result of 23 276 L/s. The pumping speeds for non-condensable gases (H2, N2) are 8%-19% higher than expected.