Microactuators

Abstract

This chapter will provide the definition of a microactuator within the context of a micromachine. A micromachine is a system that uses a small control energy to cause an observable (or controllable) perturbation to the environment. This chapter will address only machines able to generate an observable mechanical perturbation to the environment: that is, a machine able to generate a perturbation on environmental mechanical properties such as position, velocity, acceleration, force, pressure, and work. These types of machines are defined as “mechanical machines.” Within the group of mechanical machines, we are specifically interested in machines able to generate microperturbations to the environment. Microperturbation is defined as a perturbation in the environmental mechanical properties that are recorded in micro units, or some multiples of micro units, defined in terms of SI units (for example, a 1 micron change of the position of an object or a generation of a 1 micronewton force on an object). Figure 5.1 illustrates how mechanical micromachines fit into the scheme of machines and micromachines.