Sensitivity enhancement and optimization of mems piezoresistive microcantilever sensor for ultra mass detection

Abstract

Micro-cantilevers are micro-mechanical structures fixed at one finish and move freely from different finish. In this paper silicon micro-cantilever sensors are designed with variable dimensions. The deserves of MEMS sensors are its sensitivity, simplicity and high speed. This paper proposed a enhanced Piezoresisitive micro-cantilever with square shaped stress concentration regions(SCR’s) at the immobile end and on the exterior of the micro-cantilever. The piezoresistor used in this simulation is p-doped semiconducting material (silicon). In this study various structures of Piezoresisitive micro-cantilevers are compared having various number of SCR’s by determining the stress and deflection characteristics. Results show that the cantilever with 72 SCR’s of dimension 250×100×1µm has greater stress and exhibits more deflection when load is applied.