Millimeter-wave transition of coplanar line to substrate-integrated linbo3 waveguide for traveling-wave electro-optical modulator

Abstract

In this article, a transition of coplanar line to substrate-integrated waveguide onto electro-optical LiNbO3 substrate for the design of traveling-wave optical phase modulator at 60 GHz were proposed, designed, and fabricated for the first time. Micromachining of the LiNbO, substrate, which is transparent to a wide range of laser wavelengths, was done by using Excimer laser. Metallized via holes around the coplanar line are considered for the purpose of mode suppression. Also, a cavity resonator was designed to increase the circuit bandwidth. Measurement results show about 5 GHz bandwidth for the demonstrated substrate-integrated electro-optical waveguide. © 2009 Wiley Periodicals. Inc.