We describe a high-throughput scanning X-ray fluorescence (XRF) microscopy setup using a microfocused synchrotron X-ray beam, which is optimized for in-parallel X-ray characterization of composition and crystalline structure of combinatorial samples. We present X-ray fluorescence elemental maps of a full ternary CoxMnyGe1-x-y composition-spread thin film and discuss the quantitative analysis method used for obtaining the ternary composition.
Vogt, S., Chu, Y. S., Tkachuk, A., Ilinski, P., Walko, D. A., & Tsui, F. (2004). Composition characterization of combinatorial materials by scanning X-ray fluorescence microscopy using microfocused synchrotron X-ray beam. Applied Surface Science, 223(1–3), 214–219. https://doi.org/10.1016/S0169-4332(03)00895-X