Research on the key technology of LTCC pressure sensor

Abstract

This article introduces the fabrication technology processes of the capacitive pressure sensor based on the low temperature co-fired ceramic (LTCC) material. Filling the cavity with different materials as a sacrificial layer is mainly discussed, and two different materials are chosen in the fabrication. It is found that the cavity filled with polyimide expands largely during sintering, while carbon ESL49000 material filled is more preferable to keep the cavity flat. Finally, the structure leaving without an air evacuation channel is designed and tested in a built-up pressure environment, the frequency measured decreases approximately linearly with the pressure applied, which proves the design leaving no air evacuation channel advisable.