Modeling electric charge distribution on insulator under electron bombardment: Case of rectangular surface implantation

Abstract

Despite progress in the study of dielectric properties and the formation of secondary electrons images and especially in the understanding of theirmirror curve shape, since the firstmodels for mirror equationwere developed, an exact quantitative prediction of the mirror curve for most materials has remained an unsolved problem. In this paper, recent development in the characterization of charge trapping ability of insulators using the scanning electron microscope mirror method (SEMMM) is reviewed. All this work has resulted in unprecedented insights into the early stage of dielectric study and it is also relevant for a deeper understanding of this anomalous effect (mirror effect) as well as for discussion of the factors affecting it. So the dependency of elliptic mirror and the anisotropic effect in the trapping phenomena of charge is highlighted. © 2012 Author(s).