Terpene sensor array with bridge-type resistors by CMOS technology

Abstract

The interaction of terpene gas with the sensing element in the sensor array can cause changes in electrical properties because of a charge transfer and the polymer chain structure. Resistive type interdigited electrode sensor arrays covered with a mixture of molecularly imprinted polymer (MIP)/conductive polymer (CP) were designed and fabricated to detect terpene gases. MIP coated on CP (MOC) type showed markedly higher sensitivity compared to mixture of MIP and CP (MMC) type. The gas detection patterns by PCA were used to get higher selectivity of multicomponent chemical media.