Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment

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Abstract

The description of design and capabilities of a cluster implantation and deposition apparatus was presented. A number of possible experimental methods to study cluster-surface collisions and modified substrate surfaces were discussed. The results on hillock formation under energetic cluster ion bombardment were presented.

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Popok, V. N., Prasalovich, S. V., Samuelsson, M., & Campbell, E. E. B. (2002). Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment. Review of Scientific Instruments, 73(12), 4283–4287. https://doi.org/10.1063/1.1518790

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