We present universal formulas for the orientation of misfit dislocations from prismatic slip on a- and m-planes for growth of strained hexagonal and trigonal heterostructures on semipolar orientations. The formulas cover the present work on corundum-phase (Al,Ga)2O3/Al2O3 and reported results from wurtzite-phase nitride and oxide heterostructures.
CITATION STYLE
Grundmann, M. (2020). Universal relation for the orientation of dislocations from prismatic slip systems in hexagonal and rhombohedral strained heterostructures. Applied Physics Letters, 116(8). https://doi.org/10.1063/1.5140977
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