Abstract
Diamond Like Carbon (DLC) films have several unique characteristics, high-hardness, wear resistances, low friction, and good chemical stability. Thus, their applications are widely spread, for example, automotive and mechanical sliding parts, cutting tools, and molding dies. In this paper, we describe their deposition processes, film structures, characteristics and mechanical properties, and their applications. Finally, we mention some recent developments and possibilities.
Cite
CITATION STYLE
Miyake, K. (2017). Characteristics and applications of diamond like carbon (DLC) films. Journal of the Vacuum Society of Japan, 60(11), 428–436. https://doi.org/10.3131/jvsj2.60.428
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