Integrated piezoelectric transducers based on PiezoMUMPs technology have been designed and fabricated with applications to the field of resonant sensors for aromatic compounds detection in urban and industrial areas. The chemical interface will be based on supramolecular receptors, attached to a ZnO layer, that are able to selectively detect benzene molecules. Several mechanical structures have been conceived, here a preliminary study has been performed considering a clamped-clamped device. The effect of receptors placed on Zinc Oxide substrate, deposited on the surface of resonant cantilevers, has been investigated. Furthermore methodologies, design, microscale fabrication and experimental results are also presented.
Trigona, C., Algozino, A., Maiorca, F., Ando, B., & Baglio, S. (2014). Design and characterization of Piezo MUMPs microsensors with applications to environmental monitoring of aromatic compounds via selective supramolecular receptors. In Procedia Engineering (Vol. 87, pp. 1190–1193). Elsevier Ltd. https://doi.org/10.1016/j.proeng.2014.11.379