Modeling of MEMS based piezoelectric cantilever design using flow induced vibration for low power micro generator: A review

Abstract

Low power micro/nano devices are tremendously used in our daily life. Battery is a traditional energy source for portable or wearable devices and remote system application. But it has limited lifetime, bulky size and harmful during disposal to the environment. Ambient vibration energy can be considered for small-scale application and converted into electrical energy using three mechanisms: Piezoelectric, electrostatic and electromagnetic. In this study, piezoelectric mechanism will be used to develop a piezoelectric cantilever with a proof mass on its free-end to reduce resonant frequency. An ambient fluid flow energy will be applied to generate vibration of the cantilever. An analytical model will be developed to get an optimised geometrical dimensions of the cantilever which will be designed using SolidWorks. A bluffbody will be placed in front of the piezoelectric cantilever with the integration of electronic circuits in a micro-channel where ambient fluid will get barrier due to the bluffbody. As a result, turbulence will be created to displace the free-end and then generate vibration of the cantilever. The simulation of Finite Element Analysis (FEA) on the piezoelectric cantilever in CoventorWare will be carried out the modulesof fluid dynamics, structural vibration and electrical response. The simulated results can be obtained such as stress, strain, resonant frequency, displacement, voltage and power output. A voltage output is expected from 2.9-4.5 mV at the wind speed of 2-5 m sec-1 from the developed piezoelectric energy harvester system. The achievement of the voltage can be used to drive an ultra-low power micro generator circuits.