Chromatic confocal sensor-based on-machine measurement for microstructured optical surfaces featuring a self-aligned spiral center

Abstract

Chromatic confocal sensor-based on-machine measurement is effective for identifying and compensating for form errors of the ultra-precisely machined components. In this study, an on-machine measurement system was developed for an ultra-precision diamond turning machine to generate microstructured optical surfaces, for which the sensor probe adopts a uniform spiral scanning motion. To avoid the tedious spiral center alignment, a self-alignment method was proposed without additional equipment or artefact, which identified the deviation of the optical axis to the spindle axis by matching the measured surface points and the designed surface. The feasibility of the proposed method was demonstrated by numerical simulation with full consideration of noises and system dynamics. Practically, taking a typical microstructured surface as an example, the on-machine measured points were reconstructed after calibrating the alignment deviation, which was then verified by off-machine white light interferometry measurement. Avoiding tedious operations and special artefacts may significantly simplify the on-machine measurement process, thereby greatly improving the efficiency and flexibility for the measurement.