Multiple wavelength diffractive imaging

Abstract

We demonstrate coherent diffraction imaging using multiple harmonics from a high-harmonic generation source. An algorithm is presented that builds the known incident spectrum into the reconstruction procedure with the result that the useable flux is increased by more than an order of magnitude. Excellent images are obtained with a resolution of (165±5) nm and compare very well with images from a scanning electron microscope. © 2009 The American Physical Society.